| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detection processing system capable of easily performing inspection of a deep part for detecting internal defect of an inspection object.SOLUTION: The defect detection processing system includes an acquisition section, a detection section and an output section. The acquisition section acquires temperature of an inspection object. The detection section detects temperature changes between a first temperature of the inspection object before supplying a liquid to the surface of the inspection object and a second temperature of the inspection object after supplying the liquid to the surface. The output section extracts a piece of information representing a defect of the inspection object based on the detected temperature changes and outputs the same.SELECTED DRAWING: Figure 3 |
