发明名称 PROFILES FOR PRECURSORS TO POLYMERIC MATERIALS
摘要 Methods for obtaining a profile for a batch, or lot, of a precursor material and using the profile while processing the precursor material to form a polymer are disclosed. In such a method, a process profile that corresponds to the characteristics of a particular precursor material (e.g., the batch, etc.) may be generated. That process profile may then be used to cause a material processing system to process the precursor material in a manner that accounts for differences between that precursor material and a “standard” precursor material, while providing a polymer and, optionally, a film of “standard” quality. Apparatuses and systems that are configured to obtain profile data for a batch of precursor material, generate or modify a process profile based on the profile data and use the process profile to form a polymer are also disclosed.
申请公布号 US2016319418(A1) 申请公布日期 2016.11.03
申请号 US201615150023 申请日期 2016.05.09
申请人 HzO, Inc. 发明人 Dempster James D.
分类号 C23C14/06 主分类号 C23C14/06
代理机构 代理人
主权项 1. A method for packaging a precursor material for use in a material deposition process, comprising: analyzing at least one characteristic of a sample of a batch of the precursor material; based on the at least one characteristic, determining a profile of the batch of the precursor material; storing the profile on a tag; packaging a portion of the batch of the precursor material with a boat configured for introduction into a material processing apparatus; and associating the tag with the boat.
地址 Draper UT US