发明名称 Purge apparatus for purging a container
摘要 A nozzle is made not to obstruct the alignment of a container without an actuator. When the nozzle contacts the container before the alignment member does, the container is guided by means of a guide surface of the nozzle, the nozzle is lowered by a load applied from the container so that the alignment member contacts the container to align the container, and purge gas is injected from the nozzle into the container.
申请公布号 IL246131(A) 申请公布日期 2016.12.29
申请号 IL20160246131 申请日期 2016.06.08
申请人 MURATA MACHINERY LTD. 发明人
分类号 H01L 主分类号 H01L
代理机构 代理人
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