SECONDARY ELECTRON EMISSION RATE MEASURING APPARATUS

摘要

A low-cost and small secondary electron emission rate measuring apparatus is provided. The secondary electron emission rate measuring apparatus is provided with a secondary electron measuring section having a small secondary electron measuring unit and a sample holding section for holding a subject to be measured, in a vacuum chamber. The small secondary electron measuring unit is composed of a charged particle generating source, which has a tube-like electrode having an opening at the top and a bar-like electrode at the center axis section of the tube-like electrode, and generates charged particles by glow discharge plasma; an electrostatic lens for focusing charged particle beams and irradiating the subject with the focused beam; and a secondary electron collector section for capturing secondary electrons emitted from the subject. The secondary electron emission rate measuring apparatus is also provided with a gas exhaust section for depressurizing the vacuum chamber; a gas supplying section for supplying the charged particle generating source with a gas to be the charged particles; a voltage applying section and a current measuring section for applying voltages to the charged particle generating source, the electrostatic lens and the secondary electron collector electrode and measuring currents; and a control computer for controlling such sections and calculating secondary electron emission rates.