METHOD OF DIFFUSING IMPURITIES INTO CRYSTAL SILICON PARTICLES, PHOTOELECTRIC CONVERSION DEVICE, AND PHOTOVOLTAIC GENERATOR

摘要

PROBLEM TO BE SOLVED: To provide a method of diffusion capable of uniformly forming a second conductive semiconductor layer for a great amount of crystal silicon particles and further to provide a photoelectric conversion device at low cost having high performance and high reliability.

SOLUTION: A method of diffusing impurities into crystal silicon particles has process of forming silica glass containing impurities for a second conductive semiconductor on the surface of crystal silicon particles by introducing an impurity gas containing oxygen while inputting a great amount of first conductive crystal silicon particles into a diffusion pipe to make stir and process of forming a second conductive silicon layer by making impurities diffuse on the surface of the crystal silicon.

COPYRIGHT: (C)2008,JPO&INPIT