| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of depositing on a resin substrate a multi-layered film excellent in durability at a lower material expense under safe working environments in a short period of time with an excellent yield. <P>SOLUTION: A resin substrate 6 to be film-deposited is mounted on a freely rotatably supported substrate holder 5. Metal targets 4 of different kinds are mounted on each of a plurality of cathodes 3 fixed so as to surround the resin substrate 6. Each metal target 4 is sputtered in an inert gas atmosphere, and the resin substrate 6 mounted on the rotating substrate holder 5 is film-deposited successively and alternately to form a metal multi-layered film. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
