| 发明名称 |
Micromechanical structure and a method of fabricating a micromechanical structure |
| 摘要 |
A micromechanical structure and a method of fabricating a micromechanical structure are provided. The micromechanical structure comprises a silicon (Si) based substrate; a micromechanical element formed directly on the substrate; and an undercut formed underneath a released portion of the micromechanical element; wherein the undercut is in the form of a recess formed in the Si based substrate. |
| 申请公布号 |
US8278725(B2) |
申请公布日期 |
2012.10.02 |
| 申请号 |
US20070514304 |
申请日期 |
2007.11.09 |
| 申请人 |
TRIPATHY SUDHIRANJAN;SAHMUGANATHAN VICKNESH S/O;AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH |
发明人 |
TRIPATHY SUDHIRANJAN;SAHMUGANATHAN VICKNESH S/O |
| 分类号 |
H01L21/00;H01L29/04 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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