| 摘要 |
PROBLEM TO BE SOLVED: To implement a guide rail having a shape freely expanded/contracted according to temperature fluctuation and not deformed, and to implement structure unambiguously determining an optimum clearance between the guide rail and a carrying tray. SOLUTION: The carrying device comprises: a pair of guide rails attached to a support base; and recess parts respectively disposed to the pair of the guide rails to pinch the carrying tray therebetween. The guide rail further comprises: guide rail main bodies having the recess parts; and rail bases having one surface in contact with a bottom surface of the guide rail main body and the other surface attached to the support base, and made from material better in heat conductivity than the guide rail main body. COPYRIGHT: (C)2009,JPO&INPIT
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