| 摘要 |
PROBLEM TO BE SOLVED: To reliably measure a fine surface shape of an object using an optical sensor by an inexpensive and simple configuration.SOLUTION: An object 2 is irradiated with a scan illumination by a scan unit 1, reflection light reflected on a surface to be measured of the object 2 is received by a detection unit 4, thereby measuring a shape of the object 2. The detection unit 4 includes: a plurality of light guide members adjacently arranged so as to be in the longitudinal direction of the object 2 in a longitudinal surface; and optical sensors 410, 411 for receiving light emitted from an emitting surface of the light guide member and incident from the longitudinal surface constituting an incident surface of each light guide member. Reflection light from the object 2 is image-formed in the vicinity of the incident surface of the detection unit 4 by an image forming element 3. The surface shape of a region reflected by the reflection light of the object 2 is measured according to an output distribution of optical sensors 410, 411 arranged to face the light emission surface of each light guide member.SELECTED DRAWING: Figure 1 |
