发明名称 NONPLANAR WAFER AND METHOD FOR PRODUCING A NONPLANAR WAFER
摘要 The invention relates to a method for cutting off at least one portion (4), in particular a wafer, from a solid body (2). The method comprises at least the following steps: modifying the crystal lattice of the solid body (2) by means of a modifier (18), wherein a number of modifications (19) are produced to form a nonplanar, in particular convex, detachment region (8) in the interior of the solid body, wherein the modifications (19) are produced in accordance with predetermined parameters, wherein the predetermined parameters describe a relationship between a deformation of the portion (4) and a defined further treatment of the portion (4), detaching the portion (4) from the solid body (2).
申请公布号 WO2016113309(A1) 申请公布日期 2016.07.21
申请号 WO2016EP50574 申请日期 2016.01.13
申请人 SILTECTRA GMBH 发明人 RICHTER, JAN
分类号 H01L21/02;B28D5/00 主分类号 H01L21/02
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