| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a metal or metal oxide laminated plastic film capable of enduring use in electronic paper, organic EL display and lighting application, etc., and extremely high in gas barrier performance.SOLUTION: A method for manufacturing a metal or metal oxide laminated plastic film 55 includes continuously depositing a metal or metal oxide film on a plastic film 2 using a vacuum film deposition apparatus having means 3 for feeding the plastic film 2, means 6 and 60 for depositing a metal or metal oxide film and winding means 10 in a vacuum vessel 1. The vacuum film formation apparatus has exhaust speed control means for controlling an exhaust time until a pressure in the vacuum vessel 1 reaches a pressure of 1kPa from the atmospheric pressure, and the exhaust time is 270 sec/mor more to the volume of the vacuum vessel 1. The film deposition surface on the plastic film 2 is subjected to foreign matter removal treatment before the plastic film 2 enters into the film deposition means 6 and 60 and enters into the winding means 10.SELECTED DRAWING: Figure 1 |
