发明名称 PHOTOSENSITIVE RESIN COMPOSITION
摘要 Provided is a photosensitive resin composition that, despite having high sensitivity, can improve cohesion between a pattern curing film and metal wiring subsequent to a reflow process in a pattern curing film of a semiconductor device. This photosensitive resin composition is characterized by containing: at least one alkali-soluble resin selected from (a-1) resins principally containing a structure represented by general formula (1), (a-2) polyimides, and copolymers of these; and (c) a compound principally containing a structure represented by general formula (2).
申请公布号 WO2016152656(A1) 申请公布日期 2016.09.29
申请号 WO2016JP58175 申请日期 2016.03.15
申请人 TORAY INDUSTRIES, INC. 发明人 IKEDA, Yoshifumi
分类号 G03F7/023;C08G8/10;C08G73/14;C08G73/22;G03F7/004 主分类号 G03F7/023
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