METAL OXIDE-POLYMER COMPOSITE PARTICLES FOR CHEMICAL MECHANICAL PLANARIZATION

摘要

CMP processes, tools and slurries utilize metal oxide-polymer composite particles that include metal oxide particles and a polymer core. The metal oxide particles are modified with a modifying agent and are partially or fully embedded within the polymer core. Using these processes, tools and slurries can enhance removal rates, reduce defectivity and increase cleanability with respect to comparable systems and substrates.

主权项

1. A process for removing material from a substrate through chemical and abrasive actions, the process comprising:
removing material from a substrate with a polishing pad or slurry composition, wherein the polishing pad, or the slurry composition, or both include metal oxide-polymer composite particles that comprise a plurality of metal oxide particles and a polymer core, to produce a processed surface, wherein: the metal oxide particles are modified with a modifying agent, and at least a portion of the metal oxide particles are partially embedded within the polymer core and project out from the polymer core.