PACKAGE INTEGRATED SYNTHETIC JET DEVICE

摘要

Embodiments include a synthetic jet device formed within layers of a package substrate, such as to provide a controlled airflow for sensing or cooling applications. The jet device includes an electromagnetically driven vibrating membrane of conductive material between a top and bottom cavity. A top lid with an opening covers the top cavity, and a permanent magnet is below the bottom cavity. An alternating current signal conducted through the membrane causes the membrane to vibrate in the presence of a magnetic field caused by the permanent magnet. By being manufactured with package forming processes, the jet (1) is manufactured more cost-effectively than by using silicon chip or wafer processing; (2) is easily integrated as part of and with the other layers of a package substrate; and (3) can be driven by a chip mounted on the package. Embodiments also include systems having and processes for forming the jet.

主权项

1. A synthetic jet device comprising:
a vibrating membrane disposed between a top cavity and a bottom cavity; a lower support disposed between the vibrating membrane and a permanent magnet, the lower support having a bottom surface coupled to a top surface of the permanent magnet around a perimeter of the top surface of the permanent magnet; an upper support disposed between the vibrating membrane and a top lid, the upper support having a top surface coupled to a bottom surface of the top lid around a perimeter of the bottom surface of top lid; and an opening through the lid to allow puffs of fluid to be expelled from the top cavity through the opening when the vibrating membrane vibrates.