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发明名称
MICROCOLUMNS ARRAY
摘要
申请公布号
KR100506027(B1)
申请公布日期
2005.08.04
申请号
KR20020072345
申请日期
2002.11.20
申请人
发明人
分类号
G03F7/213;(IPC1-7):G03F7/213
主分类号
G03F7/213
代理机构
代理人
主权项
地址
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