| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage device, which improves operation precision of an actuator, and to provide a joining apparatus including the stage device. SOLUTION: The actuator has: a cylindrical cylinder body; a piston assembly that has a piston body stored in the cylinder body, and a tilted section that is tightened to a drive target and can be tilted freely to the piston body; a scale fixed to one of the cylinder body and the piston assembly; a scale read section fixed to the other of the cylinder body and the piston assembly to read the scale; and a rotation restraint section for restraining the rotation of the piston assembly to the cylinder body. COPYRIGHT: (C)2010,JPO&INPIT |
