WAVEGUIDE STRUCTURE AND MANUFACTURING METHOD THEREOF

摘要

A waveguide structure includes a signal line and two static lines. The signal line is disposed between the static lines in a first direction. The static lines and the signal line are disposed parallel to one another. Each static line includes a first conductive pattern, a second conductive pattern, and a third conductive pattern. The first conductive pattern and the signal line are disposed on an identical plane of a dielectric layer. A thickness of the first conductive pattern is substantially equal to a thickness of the signal line. The second conductive pattern is disposed on the first conductive pattern. A width of the first conductive pattern is larger than a width of the second conductive pattern in the first direction. The third conductive pattern is disposed on the second conductive pattern. A width of the third conductive pattern is larger than the width of the second conductive pattern.

主权项

1. A waveguide structure, comprising:
a signal line disposed on a dielectric layer; and two static lines, wherein the signal line is disposed between the two static lines in a first direction, the static lines are disposed parallel to the signal line, and each of the static lines comprises:
a first conductive pattern disposed on a same plane of the dielectric layer as the signal line, wherein a thickness of the first conductive pattern is substantially equal to a thickness of the signal line;a second conductive pattern disposed on the first conductive pattern, wherein a width of the first conductive pattern in the first direction is larger than a width of the second conductive pattern in the first direction; anda third conductive pattern disposed on the second conductive pattern, wherein a width of the third conductive pattern in the first direction is larger than the width of the second conductive pattern in the first direction.