Thin-film coating installation

摘要

The thin-film coating installation incorporates an electric-arc evaporator section (100) in which charged particles of a coating material are produced by cathode arc discharge, a plasma duct (200) with a bend leading to a substrate (1), and a system (310, 320, 330) for producing a magnetic field so that charged particles from the evaporator section are fed to the substrate. The installation further incorporates a reflective magnetic field source (350) which serves to produce, together with the system (310, 320, 330), a magnetic field whose flux lines run along the plasma duct.