PRODUCTION OF THIN CUBIC BORON NITRIDE COATINGS

摘要

The invention relates to a method for the production of coatings containing crystalline compounds of elements B and N on a substrate, wherein the compounds from the gas phase are deposited in an atmosphere, comprising a) one or several compounds acting as a source for B and N, b) hydrogen, and c) optionally one or more inert gases and/or halogens and/or oxygen, wherein the molar ratio of the compounds in a) to hydrogen is