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发明名称
摘要
申请公布号
JP2812085(B2)
申请公布日期
1998.10.15
申请号
JP19920214843
申请日期
1992.08.12
申请人
发明人
分类号
H01L21/60;H01L23/50;(IPC1-7):H01L23/50
主分类号
H01L21/60
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