DIGITAL X-RAY DETECTOR TO ELIMINATE INFLUENCE CAUSED BY CHARGES GENERATED FROM UPPER PART OF TFT DUE TO X-RAY

摘要

PURPOSE: A digital X-ray detector is provided to eliminate the influence caused by the charges generated from the upper part of a TFT(thin film transistor) due to x-ray by making the TFT formed of a staggered type including a channel in its lower part and a gate in its upper part. CONSTITUTION: A TFT, a storage capacitor and a charge collecting electrode are formed in the proper positions on a transparent insulation substrate. A photo conductive layer and a conductive electrode are sequentially formed on the charge collecting electrode. The TFT is formed of a structure of a staggered type including a channel in its bottom part and a gate in its top part.