发明名称 |
Substrate susceptor for receiving a substrate to be deposited upon |
摘要 |
This invention includes substrate susceptors which receive substrates to be deposited upon. In one implementation, a substrate susceptor includes a body having a substrate receiving side. The substrate receiving side has a face having a substrate receiving recess formed therein. The recess has an outer peripheral sidewall. At least three projections extend outwardly from a portion of the face. The projections respectively comprise a radially inner sidewall which extends outwardly from the recess outer peripheral sidewall to a projection upper surface. Other aspects and implementations are contemplated.
|
申请公布号 |
US2006191483(A1) |
申请公布日期 |
2006.08.31 |
申请号 |
US20060400009 |
申请日期 |
2006.04.07 |
申请人 |
BLOMILEY ERIC R;DREWES JOEL A;RAMASWAMY NIRMAL;DANDO ROSS S |
发明人 |
BLOMILEY ERIC R.;DREWES JOEL A.;RAMASWAMY NIRMAL;DANDO ROSS S. |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|