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发明名称
摘要
申请公布号	JP4063986(B2)	申请公布日期	2008.03.19
申请号	JP19980371427	申请日期	1998.12.25
申请人		发明人
分类号	H01L21/20;H01L21/322;H01L21/336;H01L29/786	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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