| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device capable of suppressing occurrence of an exposure defect. <P>SOLUTION: The exposure device exposes a substrate to exposure light through first liquid. The exposure device has a first supply hole for supplying the first liquid, a liquid immersion member which has a first surface disposed at least partially in a circumference of the optical path of the exposure light and can hold the first liquid supplied from the first supply hole between a body which is movable to the first surface and the first surface, and a drying preventing device which prevents the first surface from being dried. <P>COPYRIGHT: (C)2009,JPO&INPIT |
