发明名称 METHOD FOR MANUFACTURING ORGANIC THIN FILM TRANSISTOR USING BANK STRUCTURE WITH SPLITTER
摘要 The present invention relates to a method for manufacturing an organic thin film transistor using an inkjet printer which, more specifically, is a method for manufacturing organic thin film transistor, wherein, regarding formation of TIPS-pentacene semiconductor layer, a bank with a splitter is used to control the shape of ink that is being spread out, to control the shape of the manufactured thin film transistor accordingly, and furthermore increase a display element′s resolution and increase various electronic elements′ degree of integration. According to the present invention, the method for manufacturing organic thin film transistor comprises: a first step of forming gate electrode on a substrate; a second step of forming gate insulating layer to cover gate electrode, on the entire surface of the substrate; a third step of forming source electrode and drain electrode on the gate insulating layer; and a fourth step wherein an active layer made of TIPS-pentacene is formed to cover source electrode and drain electrode, on the entire surface of the gate insulating layer, by being dropped onto an open bank structure having grooves or partitions, which has its left and right sides open, and preheated to be crystallized, thus forming an active layer. In the fourth step, solution process is used to form the active layer, and the ink-jet method is used.
申请公布号 KR20160057508(A) 申请公布日期 2016.05.24
申请号 KR20140157776 申请日期 2014.11.13
申请人 DONG-A UNIVERSITY RESEARCH FOUNDATION FOR INDUSTRY-ACADEMY COOPERATION 发明人 KIM, JAE SEON;SONG, CHUNG KUN
分类号 H01L51/00;H01L51/05;H01L51/10 主分类号 H01L51/00
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