发明名称 POLYMER, ORGANIC LAYER COMPOSITION, ORGANIC LAYER, AND METHOD OF FORMING PATTERNS
摘要 The present invention relates to a polymer comprising a part represented by chemical formula 1, an organic film composition comprising the polymer, an organic film manufactured from the organic film composition, and a method to form patterns using the organic film composition. The definition of chemical formula 1 is the same as defined in the specification. The polymer of the present invention has excellent etching resistance, and favorable solubility characteristics, thereby being applicable to a spin-on coating method.
申请公布号 KR20160099997(A) 申请公布日期 2016.08.23
申请号 KR20150022404 申请日期 2015.02.13
申请人 SAMSUNG SDI CO., LTD. 发明人 HEO, YU MI;KWON, HYO YOUNG;KIM, SEUNG HYUN;NAMGUNG, RAN;NAM, YOUN HEE;RATHWELL DOMINEA;MUN, SOO HYOUN;SONG, HYUN JI;JUNG, HYEON IL
分类号 C08G61/10;C08J5/18;G03F7/00 主分类号 C08G61/10
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