发明名称 |
POLYMER, ORGANIC LAYER COMPOSITION, ORGANIC LAYER, AND METHOD OF FORMING PATTERNS |
摘要 |
The present invention relates to a polymer comprising a part represented by chemical formula 1, an organic film composition comprising the polymer, an organic film manufactured from the organic film composition, and a method to form patterns using the organic film composition. The definition of chemical formula 1 is the same as defined in the specification. The polymer of the present invention has excellent etching resistance, and favorable solubility characteristics, thereby being applicable to a spin-on coating method. |
申请公布号 |
KR20160099997(A) |
申请公布日期 |
2016.08.23 |
申请号 |
KR20150022404 |
申请日期 |
2015.02.13 |
申请人 |
SAMSUNG SDI CO., LTD. |
发明人 |
HEO, YU MI;KWON, HYO YOUNG;KIM, SEUNG HYUN;NAMGUNG, RAN;NAM, YOUN HEE;RATHWELL DOMINEA;MUN, SOO HYOUN;SONG, HYUN JI;JUNG, HYEON IL |
分类号 |
C08G61/10;C08J5/18;G03F7/00 |
主分类号 |
C08G61/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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