发明名称 |
ENHANCED ILLUMINATION EFFICIENCY IN MASKLESS, PROGRAMMABLE OPTICAL LITHOGRAPHY SYSTEMS |
摘要 |
Embodiments described herein generally relate to a DMD. The DMD includes a base and a plurality of mirrors disposed on the base. Each mirror of the plurality of mirrors has a surface facing away from the base, and a structure is disposed on the surface of each mirror. The structure enhances the reflectance of the surface of each mirror, which enhances the efficiency of light manipulation and delivery. |
申请公布号 |
WO2016133552(A1) |
申请公布日期 |
2016.08.25 |
申请号 |
WO2015US30748 |
申请日期 |
2015.05.14 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BUDIARTO, Edward;VAEZ-IRAVANI, Mehdi;BENCHER, Christopher |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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