WAFER DETECTOR FIXED IN A BODY WITH ROBOT ARM

摘要

PURPOSE: The wafer detector can detect the presence of a wafer in a reactor without mis-operation of a sensor when proceeding the process without a cassette in a wet station. CONSTITUTION: The wafer detector detects the presence of the wafer using a robot arm transferring the wafer in the wet station. The wafer detector is characterized by including; the sensor comprising one light acceptance part(112) and one light transmission part(114); a pair of sensor fixing prolonged part(130a, 130b) fixing the light acceptance part and the light transmission part as separated; and a sensor fixing plate(130) having a sensor fixing part(130c) to fix the sensor fixing prolonged part in a body with the robot arm. The wafer detector minimizes the error generation due to the vibration in up and down operation of the robot arm because the sensor is connected with the robot arm in a body.