发明名称 PART MAINTENANCE CONTROL SYSTEM
摘要 <p>PROBLEM TO BE SOLVED: To provide a parts maintenance control system which can control maintenance timing of parts and inform it through the side of a device comprising a plurality of parts. SOLUTION: This system is provided with a first maintenance storage part 313, which stores a first a maintenance interval which is not related to the availability of an actual device for each part, a second maintenance storage part 314 which stores a second maintenance interval related with the availability thereof, a maintenance request generation part 316 which requires the maintenance of the part when the timing reaches the first maintenance interval, and a maintenance interval prolonging part 317, which judges whether the timing has reached the second maintenance interval after it reaches the first maintenance interval, and temporarily stops a maintenance request from the maintenance request generation part 316, if it is not so and prolongs the first maintenance interval.</p>
申请公布号 JP2001326150(A) 申请公布日期 2001.11.22
申请号 JP20000142518 申请日期 2000.05.15
申请人 TOKYO ELECTRON LTD 发明人 OGATA KUNIE;AIUCHI TAKASHI;TATEYAMA MASANORI
分类号 G06Q50/10;G03F7/20;G06Q50/00;H01L21/02;H01L21/027 主分类号 G06Q50/10
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