| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a barium silicide polycrystal having a low oxygen content, which has high density and no crack, and to provide a barium silicide sputtering target having a low oxygen content. <P>SOLUTION: The barium silicide polycrystal, characterized in that the oxygen content in the polycrystal is 10 mol% or less and the density is 3.0 g/cm<SP POS="POST">3</SP>or more, is produced by preparing a barium silicide powder having an oxygen content of 10 mol% or less by using barium and silicon powders. <P>COPYRIGHT: (C)2013,JPO&INPIT |
