| 摘要 |
PURPOSE: A scribing method of a semiconductor laser diode is provided to make it easy to align a scribing direction of a substrate and to contact a tip to a metal reflection film directly. CONSTITUTION: According to the scribing method of a semiconductor laser diode, a back surface of a substrate(20) where a number of semiconductor laser diodes(30-1,30-2,30-3,30-4) are formed is polished. Reflective films(40-1,40-2,40-3,40-4) are formed at every area corresponding to each position of the plurality of semiconductor laser diodes, among the polished rear surface areas of the substrate. Then, scribing is performed according to the back surface of the substrate where the reflective film is not formed, in order to separate the plurality of semiconductor laser diodes into individual devices.
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