摘要 |
PURPOSE: A low temperature refrigerant storage device is provided to adjust the position and to compensate the temperature by using a driving element in the lower opening part, and to improve the stability by restricting low temperature contraction or expansion. CONSTITUTION: A storage device of low temperature refrigerant is composed of a vacuum container(21) keeping vacuum for preserving low temperature refrigerant between the inner wall and the outer wall, a vacuum flange(22) connected to a vacuum pump for forming and maintaining vacuum, a low temperature refrigerant injection port(23) putting refrigerant into the vacuum container, a cold finger(24) transmitting heat between the low temperature refrigerant and the element, a detecting sensor(25) inserted to the cold finger to measure temperature, a superconductive element(26) fixed to the end of the cold finger, and piezo elements(27a,27b) automatically adjusting the pose or the position of the vacuum container in the lower opening part of the vacuum container.
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