| 摘要 |
PROBLEM TO BE SOLVED: To provide a roll for transporting and cooling a long sized film including a gas introduction mechanism in a low cost structure which is easily created.SOLUTION: In a can roll 56 which is cooled by rolling a long sized film F transporting by a roll-to-roll in a vacuum chamber 51, a region where the long sized film F is rolled, in an outer circumference face 100a of a cylindrical member 100 for composing the can roll 56, is made rough by sand blast etc. so that a great number of gas flow paths connected in the outer circumference face 100a direction is formed, for example, an arithmetic average roughness Ra becomes 0.5 to 10 μm, and a plurality of gas supply paths 103 is provided for connecting to at least one end in a center axis 111 direction of the cylindrical member 100 in a region 102 which is made rough, the gas supply paths 103 extending to the center axis 111 direction.SELECTED DRAWING: Figure 2 |
