| 摘要 |
PROBLEM TO BE SOLVED: To accurately carry out shape measurement without being influenced by a warp of a probe.SOLUTION: A plane dichroic mirror 10 and a spherical mirror 16 are integrally provided at a probe tip end portion 3. The tilting amount of the plane dichroic mirror 10 is measured by an autocollimator optical system 5, and the deviation amount in X-axis and Y-axis directions of the spherical mirror 16 is measured by a translational moving amount measuring optical system 12. A deviation amount calculating portion 42b calculates the deviation amount in the X-axis and Y-axis directions to a reference position of a sphere 19 which is a contact point contacting with a surface of a measured article 4 at the probe tip end portion 3, on the basis of the measured tilting amount of the plane dichroic mirror 10 and the deviation amount of the spherical mirror 16. An estimating portion 42c estimates positions in the X-axis and Y-axis directions of the sphere 19 of the probe tip end portion 3, from the deviation amount calculated by the deviation amount calculating portion 42c. |
