| 摘要 |
The invention concerns a device to conduct an electrochemical reaction on the surface of a semiconductor substrate (S), characterized in that the device comprises: - a container (10) intend-ed to contain an electrolyte (E), - a support (20) ar-ranged in the container, said support being adapted for attachment of the semiconductor substrate (S) on said support (20), - a counter-electrode (30) ar-ranged in the container (10), - illumination means (50) comprising a source (51 ) emitting light rays and means (52) to homogenize the light rays on all of said surface of the semiconductor substrate (S), so as to activate the surface of the semiconductor substrate (S), and - an electric supply (40) compris-ing connection means for connection to the semi-conductor substrate and to the counter-electrode in order to polarize said surface of said semiconductor substrate (S) at an electric potential permitting the electrochemical reaction. The invention also con-cerns the method to conduct an electrochemical re-action on a surface of a corresponding semiconduc-tor substrate. |
