Method for forming pattern, structural body, method for producing comb-shaped electrode, and secondary cell

摘要

A method for forming a pattern multiple patterns of identical or different pattern materials can be formed on a support in a short time, a structural body, a method for producing a comb-shaped electrode, and a secondary cell. The pattern forming method, in which n patterns (n≧2) are formed on a support, includes forming a first resist layer on the support surface; repeating: forming a guide hole through all resist layers by exposure and development, filling a kth pattern material into the guide hole by a screen printing process, and forming a (k+1)th resist layer on the kth resist layer and the pattern materials, regarding kth (k=1 to n−1) pattern material and resist layer in order of k=1 to n−1; performing guide hole formation and nth pattern material filling similarly, and removing all of the resist layers.

主权项

1. A method for forming a pattern, in which n patterns (n: an integer of at least 2) of identical or different pattern materials are formed on a support, the method comprising:
forming a first resist layer by coating a positive-type resist composition on a surface of the support, with respect to a kth pattern material and a kth resist layer in order of from k=1 to k=n−1 (k: an integer of 1 to n−1), repeating the steps of (i) to (iii):
(i) forming a guide hole through 1st to kth resist layers by exposure and development,(ii) filling a kth pattern material into the guide hole by a screen printing process, and(iii) forming a (k+1)th resist layer by coating a positive-type resist composition on the kth resist layer and the kth pattern material that has been filled into the guide hole, forming a guide hole through 1st to nth resist layers by exposure and development, completely filling a nth pattern material into the guide hole by a screen printing process, and removing the 1st to nth resist layers.