Piezoelectric devices

摘要

Piezoelectric devices are provided. A device can include a top electrode, a first piezoelectric layer having an upper surface disposed on a lower surface of the top electrode, a first center electrode having an upper surface disposed on a lower surface of the first piezoelectric layer, an insulating layer having an upper surface disposed on a lower surface of the first center electrode, a second center electrode having an upper surface disposed on a lower surface of the insulating layer, a second piezoelectric layer having an upper surface disposed on a lower surface of the second center electrode, and a bottom electrode having an upper surface disposed on a lower surface of the second piezoelectric layer. The insulating layer can be positioned substantially at a vertical center of the piezoelectric device. The first center electrode can be electrically connected to the second center electrode.

主权项

1. A piezoelectric device array, the array comprising:
a first piezoelectric beam and a second piezoelectric beam each coupled to a clamp and extending substantially perpendicular to the clamp, wherein the piezoelectric beams are configured to oscillate substantially in phase with one another; a first proof mass coupled to the first piezoelectric beam; and a second proof mass coupled to the second piezoelectric beam, the first and second proof masses selected to enable the first and second piezoelectric beams to oscillate in phase.