| 摘要 |
PROBLEM TO BE SOLVED: To enhance the reliability of an ion source.SOLUTION: An ion source 10 includes: a plasma chamber 12 having an ion extraction part 22 provided with an extraction opening 24, and a sidewall 20 extending in the axial direction from the ion extraction part 22, and applied with a high potential; an insulation member 52 separating from the sidewall 20 so as to surround the outer periphery thereof and extending in the axial direction; a conductive member 54 provided on the inner side face 52b of the insulation member 52; a protective member 56 provided on the outer side face 52a of the insulation member 52; a shield member 58 provided to close the space between plasma chamber 12 and insulation member 52 in the vicinity of the ion extraction part 22; and a magnetic field generator 16 provided on the outside of the insulation member 52, and generating a magnetic field in the plasma chamber 12.SELECTED DRAWING: Figure 1 |
