发明名称 Vapor generating method and apparatus using same
摘要 A vapor generating apparatus comprises: a convergent-divergent nozzle 50 having an inlet port 50a and an outlet port 50a for a gas for a vapor medium, the convergent-divergent nozzle 50 comprising a convergent nozzle portion 51a, which is formed so as to be tapered and narrowed from the inlet port 50a toward the outlet port 50b, and a divergent nozzle portion 51c, which is formed so as to be expanded from the convergent nozzle portion 51a toward the outlet port 50b; and a supply port 54 for a liquid to be evaporated, the supply port 54 being open to the divergent nozzle portion 51c of the convergent-divergent nozzle 50. Thus, it is possible to easily produce a gas using a smaller number of control factors, and it is possible to increase the amount of produced gas and decrease the vapor generating time.
申请公布号 US6157774(A) 申请公布日期 2000.12.05
申请号 US19980079767 申请日期 1998.05.15
申请人 TOKYO ELECTRON LIMITED;MOTOYAMA ENG. WORKS, LTD. 发明人 KOMINO, MITSUAKI;UCHISAWA, OSAMU
分类号 B01F3/04;B01F5/04;B01F15/00;B01F15/06;C23C16/448;H01L21/00;(IPC1-7):A01G13/06;F23D11/10 主分类号 B01F3/04
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