发明名称 |
Vapor generating method and apparatus using same |
摘要 |
A vapor generating apparatus comprises: a convergent-divergent nozzle 50 having an inlet port 50a and an outlet port 50a for a gas for a vapor medium, the convergent-divergent nozzle 50 comprising a convergent nozzle portion 51a, which is formed so as to be tapered and narrowed from the inlet port 50a toward the outlet port 50b, and a divergent nozzle portion 51c, which is formed so as to be expanded from the convergent nozzle portion 51a toward the outlet port 50b; and a supply port 54 for a liquid to be evaporated, the supply port 54 being open to the divergent nozzle portion 51c of the convergent-divergent nozzle 50. Thus, it is possible to easily produce a gas using a smaller number of control factors, and it is possible to increase the amount of produced gas and decrease the vapor generating time.
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申请公布号 |
US6157774(A) |
申请公布日期 |
2000.12.05 |
申请号 |
US19980079767 |
申请日期 |
1998.05.15 |
申请人 |
TOKYO ELECTRON LIMITED;MOTOYAMA ENG. WORKS, LTD. |
发明人 |
KOMINO, MITSUAKI;UCHISAWA, OSAMU |
分类号 |
B01F3/04;B01F5/04;B01F15/00;B01F15/06;C23C16/448;H01L21/00;(IPC1-7):A01G13/06;F23D11/10 |
主分类号 |
B01F3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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