| 摘要 |
A pattern inspection device is provided to connect an electrode with a conductive pattern electrically through electrostatic coupling, thereby specifying a location of cross short without contacting the electrode with the conductive pattern. Power feeding electrodes(14,16) move along a cross pattern in a state when a minute space is maintained in a gap with the cross pattern as a first conductive pattern where cross short is being generated. The power feeding electrode applies AC(Alternating Current) voltage to the cross pattern by electrostatic coupling as interposing the minute spacer. Inspection electrodes(18,20) move in a direction parallel to the cross pattern by being interworked with the power feeding electrode. The inspection electrode is induced with AC voltage from a second conductive pattern by electrostatic coupling with the facing second conductive pattern. A controller specifies a location of cross short based on variation of an AC voltage value induced into the inspection electrode. |
