发明名称 |
MICROWAVE PLASMA REACTORS AND SUBSTRATES FOR SYNTHETIC DIAMOND MANUFACTURE |
摘要 |
A microwave plasma reactor for manufacturing synthetic diamond material via chemical vapour deposition, the microwave plasma reactor comprising: a microwave generator configured to generate microwaves at a frequency f; a plasma chamber comprising a base, a top plate, and a side wall extending from said base to said top plate defining a resonance cavity for supporting a microwave resonance mode between the base and the top plate; a microwave coupling configuration for feeding microwaves from the microwave generator into the plasma chamber; a gas flow system for feeding process gases into the plasma chamber and removing them therefrom; a substrate holder disposed in the plasma chamber and comprising a supporting surface for supporting a substrate; and a substrate disposed on the supporting surface,the substrate having a growth surface on which the synthetic diamond material is to be deposited in use, wherein the substrate dimensions and location within the resonance cavity are selected to generate a localized axisymmetric Ez electric field profile across the growth surface in use, the localized axisymmetric Ez electric field profile comprising a substantially flat central portion bound by a ring of higher electric field, the substantially flat central portion extending over at least 60% of an area of the growth surface of the substrate and having an Ez electric field variation of no more than ±10% of a central Ez electric field strength, the ring of higher electric field being disposed around the central portion and having a peak Ez electric field strength in a range 10% to 50% higher than the central Ez electric field strength. |
申请公布号 |
CA2821617(C) |
申请公布日期 |
2016.05.24 |
申请号 |
CA20112821617 |
申请日期 |
2011.12.14 |
申请人 |
ELEMENT SIX LIMITED |
发明人 |
DODGE, CARLTON NIGEL;INGLIS, PAUL NICOLAS;SCARSBROOK, GEOFFREY ALAN;MOLLART, TIMOTHY PETER;PICKLES, CHARLES SIMON JAMES;COE, STEVEN EDWARD;DODSON, JOSEPH MICHAEL;CULLEN, ALEXANDER LAMB;BRANDON, JOHN ROBERT;WORT, CHRISTOPHER JOHN HOWARD |
分类号 |
H01J37/32;C23C16/27 |
主分类号 |
H01J37/32 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|