| 摘要 |
PURPOSE: An apparatus for transmitting beams using a Fresnel lens array is provided to lower a unit cost for a manufacturing process by utilizing a hybrid phase Fresnel lens array. CONSTITUTION: A laser lift off apparatus includes a laser generator(100) for oscillating laser beams, a variable attenuator, and a beam uniform system(120). The laser lift off apparatus further includes a beam reflection mirror(130) for changing the directions of the laser beam, and a condensing lens(140) for focusing the laser beams. The laser lift off apparatus further includes a stage for supporting an LED wafer. The laser beams, which are emitted from a beam light source of a laser oscillator in a pulse mode, are minutely controlled by the variable attenuator. |
