发明名称 PARTICLE REMOVING DEVICE
摘要 PURPOSE: A particle removing device is provided to prevent adsorption of fine particles caused by static electricity by spreading compressed air with an air knife. CONSTITUTION: An ionizer(10) includes a discharge pin and a housing. The housing includes a body portion and a pair of extension parts. The body portion includes a through hole for insertion of the discharge pin. The extension part is extended in the longitudinal direction of the body portion. An air knife(20) includes a body and a nozzle. The body includes an air inlet(23). The nozzle discharges air flowed through the air inlet through a spraying hole to an object.
申请公布号 KR20120130392(A) 申请公布日期 2012.12.03
申请号 KR20110048279 申请日期 2011.05.23
申请人 发明人
分类号 G02F1/13;B08B3/02;H01L21/304 主分类号 G02F1/13
代理机构 代理人
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