发明名称 Material Property Measurements Using Multiple Frequency Atomic Force Microscopy
摘要 Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.
申请公布号 US2016258980(A1) 申请公布日期 2016.09.08
申请号 US201615064405 申请日期 2016.03.08
申请人 OXFORD INSTRUMENTS PLC ;OXFORD INSTRUMENTS AFM INC. 发明人 Proksch Roger;Callahan Roger
分类号 G01Q20/00;G01Q60/24 主分类号 G01Q20/00
代理机构 代理人
主权项 1. An atomic force microscope which processes a sample, comprising: a atomic force microscope cantilever which has a probe tip which moves relative to a surface of the sample; an actuator for the cantilever which actuates the probe tip; a magnetic connection to the probe tip which modulates a magnetic state of a circuit part adjacent to the probe tip; a controller, controlling said cantilever by creating relative movement between the probe tip of the cantilever and the sample and measuring values used to control said cantilever, said controller using both first and second frequencies to cause said relative movement of the cantilever, where said first and second frequencies are different frequencies, and said controller including a first frequency source that creates said first frequency and a second frequency source that creates said second frequency, said controller coupling said first frequency to the actuator to drive actuation of the probe tip, said controller coupling said second frequency to change the magnetic state of the circuit part adjacent to the probe tip connection to vary a characteristic of the surface of the cantilever probe using said second frequency; and said controller using said first and second frequencies and a measured value indicative of said relative movement, to provide information indicative of a surface of the sample.
地址 Oxfordshire GB