| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for inspecting a ceramic heater capable of easily identifying the highest heating part, and capable of easily measuring a temperature.SOLUTION: The highest heating part of a ceramic heater 2 in a circumferential direction is uniquely determined in accordance with an orientation of a heating resistor in the circumferential direction in a substrate 21. Lead bodies 28 and 29 extended from both ends of the heating resistor constituting a heating element 24 are in parallel, and therefore, a direction of a magnetic field generated by energization is opposite from each other in the one lead body 28 side and the other lead body 29 side. The direction and the magnitude of the magnetic field generated around the substrate 21 are measured by magnetic sensors 111-116 arranged around the substrate 21, and a magnitude ratio of the magnetic field is calculated, and thus, the orientation of the heating resistor in the circumferential direction, and a position of the highest heating part can be identified, and a temperature can be accurately measured. |
