发明名称 |
Measuring semiconductor doping using constant surface potential corona charging |
摘要 |
An example method of characterizing a semiconductor sample includes measuring an initial value, Vin, of a surface potential at a region of a surface of the semiconductor sample, biasing the semiconductor sample to have a target surface potential value (V0) of 2V or less, and depositing a monitored amount of corona charge (ΔQ1) on the region of the surface after adjusting the surface potential to the target value. The method also includes measuring a first value, V1, of the surface potential at the region after depositing the corona charge, determining the first change of surface potential (ΔV1=V1−V0), and determining the first capacitance value C1=ΔQ1/ΔV1, and characterizing the semiconductor sample based on V0, V1, ΔV1, ΔQ1 and C1. |
申请公布号 |
US2016356750(A1) |
申请公布日期 |
2016.12.08 |
申请号 |
US201514731677 |
申请日期 |
2015.06.05 |
申请人 |
Semilab SDI LLC |
发明人 |
Lagowski Jacek;Wilson Marshall;Savtchouk Alexandre;Almeida Carlos;Buday Csaba |
分类号 |
G01N33/00;G01R29/12;G01N27/22 |
主分类号 |
G01N33/00 |
代理机构 |
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代理人 |
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主权项 |
1. A method of characterizing a semiconductor sample, the method comprising:
measuring an initial value, Vin, of a surface potential at a region of a surface of the semiconductor sample; biasing the semiconductor sample to have a target surface potential value (V0) of 2V or less; depositing a monitored amount of corona charge (ΔQ1) on the region of the surface after adjusting the surface potential to the target value; measuring a first value, V1, of the surface potential at the region after depositing the corona charge; determining the first change of surface potential (ΔV1=V1−V0); determining the first capacitance value C1=ΔQ1/ΔV1; and characterizing the semiconductor sample based on V0, V1, ΔV1, ΔQ1 and C1. |
地址 |
Tampa FL US |