CAPACITANCE SENSATION UNIT OF PLANE POSITION MEASUREMENT DEVICE

摘要

A capacitance sensation unit of plane position measurement device for performing measurement with submicron definition is able to measure both two-dimensional position and rotational angle relative to a plane object. The main application of the capacitance sensation unit is exemplified with the position measurement of the mover of a flat motor. The capacitance sensation unit is able to measure the position and rotational angle of the mover relative to the surface of a stator in the form of a flat plate.

主权项

1. A capacitance sensation unit of plane position measurement device, comprising:
a movable main body; and a sensation section for performing one-dimensional sensation in a virtual sensation axis, the sensation section having multiple elongated sensation electrodes, the sensation electrodes being disposed on one face of the main body in parallel to each other at intervals with their lengthwise directions substantially normal to the sensation axis, the lengthwise directions of two ends of each of the sensation electrodes containing an angle unequal to 180 degrees.