| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring or inspecting device capable of making a measuring error small and achieving measurement good in reproducibility because luminance waveform is obtained as normal waveform having no projecting part. SOLUTION: By putting a diffusion plate between a stage and a base plate, the NA value of illuminating light is artificially made large. Thus, the NA value of the illuminating light is larger than the NA value of an objective even in the case of extending WD, so that a line width measuring device whose NA value is large even when the thickness of the stage is large is obtained. COPYRIGHT: (C)2007,JPO&INPIT
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