| 摘要 |
PROBLEM TO BE SOLVED: To lower a failure rate of a semiconductor testing device by reducing the number of central processing units necessary for control of a test. SOLUTION: This testing device is equipped with a plurality of test modules for testing a plurality of devices to be tested, and the central processing unit for controlling test operation of the plurality of test modules based on a designated operation mode. In the testing device, when the designated operation mode is a parallel test mode for performing the same test simultaneously in parallel by the plurality of test modules, the central processing unit controls the test operation of the plurality of test modules by executing one test process determined beforehand. When the designated operation mode is an independent test mode for performing mutually different tests independently by each of the plurality of test modules, the central processing unit controls the plurality of test modules in parallel by switching the plurality of test processes relative to each test module and executing it. COPYRIGHT: (C)2007,JPO&INPIT
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