| 摘要 |
PROBLEM TO BE SOLVED: To release and/or reset the vibration removal state in a short time with a small constitution easily. SOLUTION: In the measurement device capable of alternatively setting the non-measurement sequence at least including transfer action for positioning to the prescribed measurement position and the measurement sequence for measuring the work, at least the vibration removing means (vibration removing base 3, base 4 and vibration removing part 5) and the fixing means (Z stage 1 and holding part 2) are provided to activate the vibration removing means at the measurement sequence, and to activate the fixing means at the non-measurement sequence. COPYRIGHT: (C)2007,JPO&INPIT
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